氢气与Cu中间层对GZO薄膜光电性能的影响

吕坤, 祝柏林, 李珂, 胡文超, 谢铭, 吴隽

Effect of Hydrogen and Cu Interlayer on the Optical and Electrical Properties of GZO Thin Film

L#cod#x000dc; Kun, ZHU Bai-Lin, LI Ke, HU Wen-Chao, XIE Ming, WU Jun

图4 Cu层厚度对在室温、Ar气氛下制备的GZOCuGZO多层结构薄膜的电阻率、载流子浓度以及霍尔迁移率的影响
Fig. 4 Effect of Cu layer thickness on the resistivity, carrier concentration and Hall mobility of GZOCuGZO multiplayer films deposited at room temperature in Ar atmosphere